多(duo)晶(jing)硅(gui)(gui)(gui)是(shi)用(yong)工業(ye)硅(gui)(gui)(gui)通過化學、物理(li)途徑提純(chun)制得，多(duo)晶(jing)硅(gui)(gui)(gui)主要用(yong)于生產(chan)單晶(jing)硅(gui)(gui)(gui)和衛星太陽(yang)能(neng)電(dian)池。單晶(jing)硅(gui)(gui)(gui)即硅(gui)(gui)(gui)半導體是(shi)多(duo)晶(jing)硅(gui)(gui)(gui)的(de)衍生產(chan)品，是(shi)制造(zao)繼承電(dian)路和電(dian)子元(yuan)件(jian)的(de)優(you)質(zhi)材(cai)料，被廣泛應(ying)用(yong)于電(dian)子工業(ye)中。 還(huan)原爐沉(chen)(chen)積多(duo)晶(jing)硅(gui)(gui)(gui)是(shi)間歇操作，一(yi)個(ge)運行(xing)(xing)(xing)周(zhou)期內(nei)，硅(gui)(gui)(gui)棒不斷長大，一(yi)個(ge)運行(xing)(xing)(xing)周(zhou)期結束后打開(kai)鐘罩(zhao)收割硅(gui)(gui)(gui)棒。但在(zai)運行(xing)(xing)(xing)期內(nei)，基盤(pan)及鐘罩(zhao)表面(mian)均(jun)會產(chan)生一(yi)層土黃色粉末，其主要成(cheng)分是(shi)無定形硅(gui)(gui)(gui)。在(zai)收割硅(gui)(gui)(gui)棒后，需(xu)要進(jin)行(xing)(xing)(xing)基盤(pan)和鐘罩(zhao)的(de)清理(li)，再裝(zhuang)硅(gui)(gui)(gui)芯進(jin)行(xing)(xing)(xing)下一(yi)個(ge)周(zhou)期的(de)化學氣(qi)相沉(chen)(chen)積。

還(huan)(huan)(huan)原(yuan)(yuan)爐(lu)(lu)鐘(zhong)(zhong)罩(zhao)(zhao)(zhao)(zhao)污染物(wu)易造成(cheng)(cheng)內(nei)(nei)表面(mian)熱量(liang)反(fan)射(she)減(jian)少，使生(sheng)產(chan)能耗(hao)增加；電(dian)(dian)極(ji)周(zhou)圍污染物(wu)降(jiang)低了點(dian)擊的絕緣(yuan)而導致運行(xing)過程(cheng)(cheng)中接地故障、倒棒等生(sheng)產(chan)事故。而用(yong)于(yu)電(dian)(dian)子行(xing)業(ye)(ye)的多(duo)(duo)(duo)(duo)晶(jing)硅(gui)(gui)對(dui)產(chan)品質量(liang)純(chun)凈(jing)度(du)的控制(zhi)(zhi)要求更高(gao)， 隨(sui)著(zhu)我國(guo)半導體工業(ye)(ye)發展，對(dui)多(duo)(duo)(duo)(duo)晶(jing)硅(gui)(gui)純(chun)度(du)要求越來越高(gao)，還(huan)(huan)(huan)原(yuan)(yuan)爐(lu)(lu)沉(chen)積環境的潔凈(jing)度(du)就(jiu)顯得特別(bie)關(guan)鍵，任何顆粒性雜質、油脂等物(wu)質余(yu)留在爐(lu)(lu)內(nei)(nei)，都會(hui)對(dui)產(chan)品質量(liang)造成(cheng)(cheng)影響。那(nei)么，如何清(qing)(qing)(qing)(qing)(qing)(qing)理能方便快捷，同(tong)時效(xiao)果(guo)更佳？ 多(duo)(duo)(duo)(duo)晶(jing)硅(gui)(gui)還(huan)(huan)(huan)原(yuan)(yuan)爐(lu)(lu)清(qing)(qing)(qing)(qing)(qing)(qing)洗(xi)(xi)(xi)系統始于(yu)2009年，國(guo)內(nei)(nei)*家(jia)研發設計(ji)制(zhi)(zhi)造并獲得實用(yong)新型(xing)專利是北(bei)京德高(gao)潔清(qing)(qing)(qing)(qing)(qing)(qing)潔設備有限公司，該公司多(duo)(duo)(duo)(duo)晶(jing)硅(gui)(gui)還(huan)(huan)(huan)原(yuan)(yuan)爐(lu)(lu)鐘(zhong)(zhong)罩(zhao)(zhao)(zhao)(zhao)清(qing)(qing)(qing)(qing)(qing)(qing)洗(xi)(xi)(xi)系統覆(fu)蓋了國(guo)內(nei)(nei)多(duo)(duo)(duo)(duo)家(jia)多(duo)(duo)(duo)(duo)晶(jing)硅(gui)(gui)生(sheng)產(chan)企業(ye)(ye)。早期有高(gao)壓清(qing)(qing)(qing)(qing)(qing)(qing)洗(xi)(xi)(xi)、化學溶劑(ji)低壓清(qing)(qing)(qing)(qing)(qing)(qing)洗(xi)(xi)(xi)、機械拋光(guang)等，但大多(duo)(duo)(duo)(duo)釆用(yong)堿液中壓清(qing)(qing)(qing)(qing)(qing)(qing)洗(xi)(xi)(xi)，這(zhe)些清(qing)(qing)(qing)(qing)(qing)(qing)洗(xi)(xi)(xi)方式不(bu)(bu)僅不(bu)(bu)能將鐘(zhong)(zhong)罩(zhao)(zhao)(zhao)(zhao)清(qing)(qing)(qing)(qing)(qing)(qing)洗(xi)(xi)(xi)干(gan)凈(jing)，還(huan)(huan)(huan)會(hui)損傷表面(mian)鍍銀的還(huan)(huan)(huan)原(yuan)(yuan)爐(lu)(lu)鐘(zhong)(zhong)罩(zhao)(zhao)(zhao)(zhao)，為(wei)攻克這(zhe)一難題，一款全新的用(yong)于(yu)電(dian)(dian)子級(ji)的多(duo)(duo)(duo)(duo)晶(jing)硅(gui)(gui)還(huan)(huan)(huan)原(yuan)(yuan)爐(lu)(lu)鐘(zhong)(zhong)罩(zhao)(zhao)(zhao)(zhao)清(qing)(qing)(qing)(qing)(qing)(qing)洗(xi)(xi)(xi)系統應(ying)運而生(sheng)。 電(dian)(dian)子級(ji)多(duo)(duo)(duo)(duo)晶(jing)硅(gui)(gui)還(huan)(huan)(huan)原(yuan)(yuan)爐(lu)(lu)鐘(zhong)(zhong)罩(zhao)(zhao)(zhao)(zhao)自動清(qing)(qing)(qing)(qing)(qing)(qing)洗(xi)(xi)(xi)系統特點(dian)： 1、多(duo)(duo)(duo)(duo)晶(jing)硅(gui)(gui)還(huan)(huan)(huan)原(yuan)(yuan)爐(lu)(lu)鐘(zhong)(zhong)罩(zhao)(zhao)(zhao)(zhao)清(qing)(qing)(qing)(qing)(qing)(qing)洗(xi)(xi)(xi)系統以(yi)水為(wei)動力(li)，以(yi)水力(li)自驅動三維(wei)洗(xi)(xi)(xi)罐器為(wei)噴頭，形(xing)(xing)成(cheng)(cheng)360° 3D形(xing)(xing)式的網狀(zhuang)噴射(she)來完成(cheng)(cheng)爐(lu)(lu)筒(tong)內(nei)(nei)部表面(mian)的水力(li)掃(sao)射(she)。 2、采(cai)用(yong)可(ke)以(yi)旋轉和升(sheng)降(jiang)的清(qing)(qing)(qing)(qing)(qing)(qing)洗(xi)(xi)(xi)吹干(gan)執行(xing)機構，根據還(huan)(huan)(huan)原(yuan)(yuan)爐(lu)(lu)每個視(shi)孔鏡相對(dui)原(yuan)(yuan)點(dian)的相對(dui)位置(zhi)進行(xing)準確定位。可(ke)自動切換不(bu)(bu)同(tong)清(qing)(qing)(qing)(qing)(qing)(qing)洗(xi)(xi)(xi)液及吹干(gan)，通(tong)過控制(zhi)(zhi)系統可(ke)對(dui)清(qing)(qing)(qing)(qing)(qing)(qing)洗(xi)(xi)(xi)、吹干(gan)時間等進行(xing)調整(zheng)(zheng)。清(qing)(qing)(qing)(qing)(qing)(qing)洗(xi)(xi)(xi)時只需一鍵操(cao)(cao)作即可(ke)，操(cao)(cao)作簡(jian)單(dan)方便。 3、根據還(huan)(huan)(huan)原(yuan)(yuan)爐(lu)(lu)底(di)部法(fa)蘭的結構特設計(ji)升(sheng)級(ji)后的清(qing)(qing)(qing)(qing)(qing)(qing)洗(xi)(xi)(xi)工作臺，不(bu)(bu)僅可(ke)以(yi)滿(man)足對(dui)內(nei)(nei)壁和視(shi)孔鏡的清(qing)(qing)(qing)(qing)(qing)(qing)洗(xi)(xi)(xi)，同(tong)時也滿(man)足了底(di)部法(fa)蘭的清(qing)(qing)(qing)(qing)(qing)(qing)洗(xi)(xi)(xi)。可(ke)實現對(dui)法(fa)蘭內(nei)(nei)邊緣(yuan)的清(qing)(qing)(qing)(qing)(qing)(qing)洗(xi)(xi)(xi)，保證整(zheng)(zheng)個法(fa)蘭底(di)部都被清(qing)(qing)(qing)(qing)(qing)(qing)洗(xi)(xi)(xi)液覆(fu)蓋，并清(qing)(qing)(qing)(qing)(qing)(qing)洗(xi)(xi)(xi)、吹干(gan)。 4、在整(zheng)(zheng)個還(huan)(huan)(huan)原(yuan)(yuan)爐(lu)(lu)的清(qing)(qing)(qing)(qing)(qing)(qing)洗(xi)(xi)(xi)過程(cheng)(cheng)中，清(qing)(qing)(qing)(qing)(qing)(qing)洗(xi)(xi)(xi)、干(gan)燥中筒(tong)內(nei)(nei)形(xing)(xing)成(cheng)(cheng)微負(fu)壓狀(zhuang)態，防止清(qing)(qing)(qing)(qing)(qing)(qing)洗(xi)(xi)(xi)外(wai)溢，同(tong)時將底(di)座與(yu)筒(tong)體下法(fa)蘭處(chu)的污染物(wu)等一并吹掃(sao)，通(tong)過排污管排出，從而保證了整(zheng)(zheng)個過程(cheng)(cheng)不(bu)(bu)會(hui)對(dui)潔凈(jing)區造成(cheng)(cheng)污染。

經過實際應用，多晶硅還原爐(lu)清洗系統(tong)整套系統(tong)可實現(xian)全(quan)(quan)自動化清洗操作，在(zai)一個工作平臺上(shang)，一次吊裝可依(yi)次實現(xian)自動清洗烘干(gan)全(quan)(quan)部功能，完全(quan)(quan)實現(xian)無死角清洗，同(tong)時具有完善的聯鎖(suo)和(he)保護(hu)功能。